LaboratoryDesign|MARCH|APRIL 2016 17
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Imec 300mm Cleanroom, Leuven,
4Cost: $1.1 billion
4Size: 4,000 sm
4Team: M+W (construction), Stéphane Beel (
architect), and Wim Mertens (responsible for imec’s
4Description: Imec’s new 300mm cleanroom
is one of the most advanced research facilities
in the world dedicated to scaling IC technology
beyond 7nm. Its addition now brings imec’s total
semiconductor research cleanrooms to 12,000
sm. The facility will be able to serve the entire
semiconductor ecosystem, complies with the
newest standards in the semiconductor industry, and provides additional space for the most
advanced tools that will lead innovations in new
device and system concepts.
The cleanroom includes a “waffle table’,” a 3-ft.
thick concrete slab that forms the basis of the
cleanroom. Its structure rests on 831 concrete
piles placed 60 feet deep in the ground, making
it totally vibration-free and ensuring precision
accuracy down to a millionth of a millimeter.
The waffle table lies 50 feet above ground and
is perforated with no less than 3,300 holes (400
mm diameter), and there is constant air circulation.
To further drive Moore’s Law, crucial innovations
are required and imec offers the ideal environment for cost and time effective semiconductor
R&D advanced on materials, process steps,
modules and novel device concepts for CMOS
technologies at least two generations ahead of
manufacturing. Imec’s fundamental understanding and ability to bridge the gap between theory
and practice will define the new innovations this
cleanroom will generate.
4Completion date: March 2016
4Contact: Hanne Degans, +32 16 28 17 69,